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PERFORMANCE ACCURACY AND PRICING
OPTOSENSE ELLIPSOMETER IS THE LEADER IN THE ELIPSOMETER MARKET
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OPT-S3000 Ellipsometers
STANDARD FEATURES
- Excellent accuracy and repetition
- Widest variable angle (20°-90°)
- Adjustable stage in step 5°
- Standard wavelenght 635 nm laser
- A second laser for easy alignment and accuracy
- Measurement speed is less than 1 sec.
- Large sample stage
- User friendly software and material library
- Hundreds of materials information in material library
TECHNICAL SPECIFICATIONS
- Standard wavelength 635 nm
- Optional wavelength 470 nm, 532 nm, 785 nm, 1064 nm, 1310 nm
- Thickness range of transparent films 0 - 6000 nm
- Thickness range of absorptive films 0 - 6000 nm
- Accuracy of refractive index measurement ± 0.001
- Accuracy of film thickness measurement ± 0.1nm for SiO2 standard sample
- Stability with compensator ± 0.01° in Delta
- Measurement time less than 1 sec
- Sample alignment Second laser alignment with correction unit
- Sample stage adjustments tilt and height
- Range of angle 20 - 90°
- Angle steps 5°± 0.01°
OPTIONS
Combined Optiical Profiler
Wavelenghts 470nm, 532 nm, 635 nm, 785 nm, 1064 nm, 1310 nm
Micro Spotsize
Wafer Mapping
Automated Angle of Incidence 20-90°
Motorized XY stage
Liquid Cell
CCD image camera
Heater