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PERFORMANCE ACCURACY AND PRICING
OPTOSENSE ELLIPSOMETER IS THE LEADER IN THE ELIPSOMETER MARKET
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Proprietary ultrasonic spray technology
-Thin, defect free coating application
-Thickness down to sub-micron
- 99% transfer efficiency
Fully programmable XYZ platform
-Precision ball screw actuators
-Bench-top platform for R&D
-Windows 7 graphical user interface
Markets
-Display
-Fuel Cell
-Semiconductor Packaging
-Electronic Assembly
-Solar
-Medical
Ultrasonic frequency: 180-25 kHz
Application area: 410x410x110
Coating area: 400x400
Positioning Resolution: 0.001 mm
Positioning Repeatability: 0.025 mm
Gantry Mechanism (X,Y): 500 mm/sec
Programming: Teach mode with laser
pointer
Control System: PC With Windows 7
Standards: CE, NFPA79
Footprint: 99x86x84 cm
Weight: 181 kg
Pneumatic Requirements: Clean, dry compressed air at 5.5 bar (80 psi), 142 lt/min
2850 lt/min exhaust in a 127 mm duct
Inert gas max 50 pa
-Precision metering pump liquid delivery
-Integrated liquid stirring or agitation
-Substrate heater with control program