OPT-S9000 Ellipsometers
STANDARD FEATURES
  • Spectral range   UV-VIS 250-1100 nm or NIR 700-1700 nm or 700-2100 nm
  • Step scan analyzer for high speed
  • Low noise aquisition
  • Widest variable angle (20°-90°)
  • Rotating compensator provides accurate measurement of any polorization stage.
  • Fast measurement speed.
  • User friendly software and material library.
    • Hundreds of materials information in material library.
    • Advanced spectroscopic ellipsometry software.
TECHNICAL SPECIFICATIONS
  • Speed Typical measurement including data analysis 1 ~ 2.0 minutes
  • Thickness range of transparent films   0-30000 nm
  • Thickness range of absorptive films   0-30000 nm
  • Accuracy of refractive index measurement   ± 0.0001 
  • Accuracy of film thickness measurement   ± 0.01nm                                             
  • Stability Long term (months)   ± 0.01° in Delta
  • Measurement time 1 ~ 2.0 minutes
  • Sample alignment automated 
  • Sample stage adjustments tilt and height
  • Standard wavelength   250-1100 nm, 250-1700 nm,  250-2100 nm
  • Range of angle   20 - 90°
  • Angle steps   5°± 0.01°
OPTIONS
  • Automated Angle of Incidence 20-90°
  • Motorized XY stage
  • CCD image camera
  • Heater