OPT-S9000 Ellipsometers
OPT-S9000 Ellipsometers
- Spectral range UV-VIS 250-1100 nm or NIR 700-1700 nm or 700-2100 nm
- Step scan analyzer for high speed
- Low noise aquisition
- Widest variable angle (20°-90°)
- Rotating compensator provides accurate measurement of any polorization stage.
- Fast measurement speed.
- User friendly software and material library.
- Hundreds of materials information in material library.
- Advanced spectroscopic ellipsometry software.
- Speed Typical measurement including data analysis 1 ~ 2.0 minutes
- Thickness range of transparent films 0-30000 nm
- Thickness range of absorptive films 0-30000 nm
- Accuracy of refractive index measurement ± 0.0001
- Accuracy of film thickness measurement ± 0.01nm
- Stability Long term (months) ± 0.01° in Delta
- Measurement time 1 ~ 2.0 minutes
- Sample alignment automated
- Sample stage adjustments tilt and height
- Standard wavelength 250-1100 nm, 250-1700 nm, 250-2100 nm
- Range of angle 20 - 90°
- Angle steps 5°± 0.01°
- Automated Angle of Incidence 20-90°
- Motorized XY stage
- CCD image camera
- Heater